Long distance microscope for vacuum and process chambers
High resolution from a long distance
- Optical resolution up to 1 µm
- Working distance 100 mm
- Wavelength range from UV to
High resolution is also possible under difficult conditions: Our long distance microscope
Sample and process observation in situ in a vacuum or process chamber can often only be achieved with a long distance between the microscope and the object – but at the expense of resolution. We have risen to this challenge in the form of our long-distance process microscope. It delivers high-resolution results even from 100mm distance.
Furthermore, we offer accessories as well as cameras that allow you to achieve optimal results in focusing and pointing, and in the imaging of objects. With our lightsource.tech brand, we are specialised in high-performance light sources, complementing our range of process microscopes for complete tasks.
Typical areas in which our process microscopes are used include laser structuring, thin layers (MBE/OMBE), CVD/PVD micro 3D printing, LED/OLED, microsystems technology and nanotechnology.
1,0 µm
100 mm
200 nm – 2000 nm
Mountable directly on
process chambers
Long distance microscope: High-resolution in-situ lens from UV to NIR
Our LD process microscope is specially designed for in-situ use on vacuum or process chambers. It is mounted externally with an XYZ stage to avoid taking up space inside the chamber.
With a numerical aperture of 0.25, it is possible to image objects from a distance of 100 mm with a magnification of 10:1 and a resolution of 1 µm.
This high-performance LD process microscope covers the entire spectrum from 200 nm to 2000 nm. Optics are with diffraction-limited correction from 400 nm upwards.
The tube of the microscope can be adapted to individual needs and supplemented by accessories such as lighting or camera ports.
Options for extended applications
Optionally, coaxial lighting can be attached to the objective of the long distance microscope. It is equipped with one of our LEDs (white light or monochromatic) or one of our fiber-coupled light sources. In combination with one of our monochromators, (Monochromator-F or Hyperchromator), this LD process microscope allows hyperspectral imaging. Furthermore, use of excitation light for microspot spectroscopy is also possible. High point intensities can be achieved when laser is used.
- Can be mounted directly on a vacuum chamber
- XYZ stage for lens alignment and focusing
- Individual adjustment of the tube for lighting and cameras is possible
- Selected special cameras for UV and NIR
- Coaxial illumination available
- Hyperspectral imaging
- Microspot spectroscopy
- Working distance 100 mm
We are looking forward to your request
Contact us now
We are looking forward to your request
We will be happy to advise you personally.
Phone: +49 (0)551 270765-1
Product specifications:
| Working distance | 100.0 mm |
| Magnification | 10 x |
| Object field diameter | 2.0 mm |
| Image field diameter | 20.0 mm |
| Numerical aperture | 0.25 |
| Central shadow | 45% |
| Resolution | 1µm @ 405nm |
| Wavelength range | 0.2 µm – 2.0 µm |
| Transmission 0.25 µm – 2.0 µm | > 50% |
| Distortion | < 0.5 % |