ULD-Process Microscope, Working Distance 250 – 530 mm

Lens for Vacuum and Process chambers
High resolution for very long working distances
Our ULD microscope allows observation of samples and processes in a (vacuum) chamber in situ with a resolution of up to 3.6 μm. The lens is attached to a viewport and can be aligned via a special adapter to point at the object you want to observed in the chamber. Distances of up to half a meter are possible.
A typical application is STM microscopy, where a tip have to approach the sample. The ULD microscope helps to identify different areas of the sample and to approach the tip up to a tenth of a millimeter close to the sample.

Easy alignment to your object
Tiltable adapter for mounting on a vacuum flange
The ULD process microscope is screwed to a flange of your vacuum chamber via an adapter which can be tilted by two axes. The adapter fits DN40 and DN63 flanges. Over 4 knurled screws, the lens can be aligned to your object with high accuracy. The tilt angle is +/- 5 ° per axis.
Scheimpflug-Adapter
Sharp images despite oblique view
Often it is not possible to see perpendicular at a flat object. Then only a relatively narrow strip in the middle of the image is in focus, the rest of the image is out of focus and blurry.
With our Scheimpflug adapters, it is possible to tilt the camera and thereby again have the entire object in focus.
Adapters with 0, 15, 30 and 40 degrees tilt angle are available.
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Phone: +49 (0)551 200 192 60
Specifications
Working distance | 250 – 530 mm |
Dimensions | Length 233 – 344 mm *, max. diameter 85 mm |
Magnification | 1.1 – 0.36* |
Object field diameter | 14.5 – 44.4 mm |
Image diameter | 16 mm |
Numerical aperture | 0.054 – 0.027 * |
Resolution | 3.5 µm – 5 µm |
Wavelength range | Visible |
