Hyperspectral illumination with the EQ-99X light source from ENERGETIQS
The EQ-99X has a very broad spectral range from 200 nm to 2200 nm. Because of its extremely high luminance, it is very well suited for use with mutimode fibers.
Our lighting solutions make the most of the power of this light source and provide the light for use with multimode fibers.
Our Hyperchromator produces monochromatic light, with the High-Speed Filter Wheel, the use of any filters is possible and our fiber coupler brings the full spectral range of the EQ-99X into your fiber.
Our Hyperchromator directly picks up the light from the plasma of the EQ-99X and isolates a wavelength of your choice from the broad spectrum of 200 nm to 2200 nm.
The optical design ensures optimal use of the light for the EQ-99X. With our dual grating option, the entire spectrum can be covered without changing the grating manually.
As with the Hyperchromator, the light is picked up and collimated directly from the plasma of the lamp.
After passing through a filter wheel with 7 filters of size 42.5 mm, it is coupled into a multi mode fiber.
Switching between adjacent filters is possible in less than 80 ms.
Process microscopes for in-situ observation in vacuum and process chambers
If processes have to be observed in a vacuum or process chamber, one often faces the challenge of having to realize a large distance from the optics to the sample while still achieving the greatest possible optical resolution.
We have tackled this task in numerous projects. The result is our LD- and ULD-Process Microscopes.
Our Process-Microscope allows to observe samples and processes in a (vacuum) chamber in situ with a resolution of 1 micrometer.
The lens is attached to a viewport on the outside, so it does not occupy any space within the chamber. The object to be observed may be positioned at a distance up to 100 mm from the viewport.
If your sample is more than 100 mm away from the process chamber window, our ultra long working distance (ULD) Process-Microscope is used. Here, your sample can be located at any distance from the window of the process chamber.
At a distance of 250 mm, a resolution of 3.6 μm can be archived.
High-resolution test charts
Ordinary resolution test charts don’t go under a structure sizes of around 1 μm. Our test charts reach 100 nm and are therefore of particular interest for testing high-resolution microscope optics.
Test charts produced with high-precision e-beam lithography.
- Test charts with 7.5 to 3300 line pairs per millimeter and pinholes with diameters between 4.0 μm and 0.25 μm.
- Siemens star, segments with minimum width of only 150 nm
- Pinholes from 0.18 μm to 4 μm in diameter
- Checkerboard pattern with square 50×50 μm² or 100×100 μm² fields